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- 2002067245 contributor B9237220.
- 2002067245 contributor B9237221.
- 2002067245 created "c2002.".
- 2002067245 date "2002".
- 2002067245 date "c2002.".
- 2002067245 dateCopyrighted "c2002.".
- 2002067245 description "Includes bibliographical references (p. [131]-140) and index.".
- 2002067245 extent "viii, 142 p. :".
- 2002067245 identifier "3540431438 (alk. paper)".
- 2002067245 identifier 2002067245-d.html.
- 2002067245 identifier 2002067245-t.html.
- 2002067245 isPartOf "Microtechnology and MEMS".
- 2002067245 issued "2002".
- 2002067245 issued "c2002.".
- 2002067245 language "eng".
- 2002067245 publisher "Berlin ; New York : Springer,".
- 2002067245 subject "681/.413 21".
- 2002067245 subject "Atomic force microscopy Equipment and supplies Design and construction.".
- 2002067245 subject "Gas detectors Design and construction.".
- 2002067245 subject "Levers Design and construction.".
- 2002067245 subject "Metal oxide semiconductors, Complementary Design and construction.".
- 2002067245 subject "Microelectromechanical systems Design and construction.".
- 2002067245 subject "TK7875 .L36 2002".
- 2002067245 title "CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications / D. Lange, O. Brand, H. Baltes.".
- 2002067245 type "text".