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- 2002071761 contributor B9242130.
- 2002071761 created "c2002.".
- 2002071761 date "2002".
- 2002071761 date "c2002.".
- 2002071761 dateCopyrighted "c2002.".
- 2002071761 description "Includes bibliographical references and indexes.".
- 2002071761 extent "xi, 318 p. :".
- 2002071761 identifier "1558996230".
- 2002071761 identifier 2002071761-d.html.
- 2002071761 identifier 2002071761-t.html.
- 2002071761 isPartOf "Materials Research Society symposia proceedings ; v. 687.".
- 2002071761 isPartOf "Materials Research Society symposium proceedings ; v. 687".
- 2002071761 issued "2002".
- 2002071761 issued "c2002.".
- 2002071761 language "eng".
- 2002071761 publisher "Warrendale, Pa. : Materials Research Society,".
- 2002071761 subject "621.381 21".
- 2002071761 subject "Microelectromechanical systems Materials Congresses.".
- 2002071761 subject "TK7875 .M38 2002".
- 2002071761 title "Materials science of microelectromechanical systems (MEMS) devices IV / editors, Arturo A. Ayón ... [et al.].".
- 2002071761 type "text".