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- 2002075988 contributor B9246588.
- 2002075988 created "c2002.".
- 2002075988 date "2002".
- 2002075988 date "c2002.".
- 2002075988 dateCopyrighted "c2002.".
- 2002075988 description "Includes bibliographical references and index.".
- 2002075988 extent "xiii, 322 p. :".
- 2002075988 identifier "3540433392 (hc : alk. paper)".
- 2002075988 identifier 2002075988-d.html.
- 2002075988 identifier 2002075988-t.html.
- 2002075988 isPartOf "Springer series in materials science, 0933-033X ; v. 56".
- 2002075988 issued "2002".
- 2002075988 issued "c2002.".
- 2002075988 language "eng".
- 2002075988 publisher "Tokyo : Kodansha ; Berlin ; New York : Springer,".
- 2002075988 subject "621.39/5 21".
- 2002075988 subject "Integrated circuits Very large scale integration Design and construction.".
- 2002075988 subject "Semiconductors Materials.".
- 2002075988 subject "Silica.".
- 2002075988 subject "TK7874.75 .I87 2002".
- 2002075988 title "SiO2 in Si microdevices / Manabu Itsumi.".
- 2002075988 type "text".