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- 2002103269 alternative "Advanced thermal processing of semiconductors".
- 2002103269 alternative "RTP 2002".
- 2002103269 contributor B9251134.
- 2002103269 contributor B9251135.
- 2002103269 contributor B9251136.
- 2002103269 created "c2002.".
- 2002103269 date "2002".
- 2002103269 date "c2002.".
- 2002103269 dateCopyrighted "c2002.".
- 2002103269 description "Includes bibliographical references.".
- 2002103269 extent "[ix], 241 p. :".
- 2002103269 hasFormat "Also available via the World Wide Web.".
- 2002103269 identifier "0780374657".
- 2002103269 identifier opac?punumber=8060.
- 2002103269 isFormatOf "Also available via the World Wide Web.".
- 2002103269 issued "2002".
- 2002103269 issued "c2002.".
- 2002103269 language "eng".
- 2002103269 publisher "Piscataway, NJ : IEEE,".
- 2002103269 relation "Also available via the World Wide Web.".
- 2002103269 subject "Rapid thermal processing Congresses.".
- 2002103269 subject "Semiconductor doping Congresses.".
- 2002103269 subject "Semiconductors Defects Congresses.".
- 2002103269 subject "Semiconductors Heat treatment Congresses.".
- 2002103269 subject "TK7871.85 .I5743 2002".
- 2002103269 title "10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada / editors, J. Gelpey ... [et al.] ; IEEE Electron Devices Society.".
- 2002103269 title "Advanced thermal processing of semiconductors".
- 2002103269 title "RTP 2002".
- 2002103269 type "text".