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- 2002103470 contributor B9251300.
- 2002103470 contributor B9251301.
- 2002103470 contributor B9251302.
- 2002103470 created "c2002.".
- 2002103470 date "2002".
- 2002103470 date "c2002.".
- 2002103470 dateCopyrighted "c2002.".
- 2002103470 description "Includes bibliographical references and index.".
- 2002103470 extent "viii, 252 p. :".
- 2002103470 identifier "1566773725".
- 2002103470 isPartOf "Proceedings (Electrochemical Society) ; v. 2002-6.".
- 2002103470 isPartOf "Proceedings ; v. 2002-6".
- 2002103470 issued "2002".
- 2002103470 issued "c2002.".
- 2002103470 language "eng".
- 2002103470 publisher "Pennington, N.J. : Electrochemical Society, Inc.,".
- 2002103470 subject "Microelectronics Congresses.".
- 2002103470 subject "TK7875 .M535 2002".
- 2002103470 title "Microfabricated Systems and MEMS VI : proceedings of the international symposium / editors, P.J. Hesketh ... [et al.].".
- 2002103470 type "text".