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- 2002111727 contributor B9257417.
- 2002111727 contributor B9257418.
- 2002111727 contributor B9257419.
- 2002111727 created "c2002.".
- 2002111727 date "2002".
- 2002111727 date "c2002.".
- 2002111727 dateCopyrighted "c2002.".
- 2002111727 description "Includes bibliographical references and indexes.".
- 2002111727 extent "xiii, 478 p. :".
- 2002111727 identifier "1566773342".
- 2002111727 isPartOf "Proceedings (Electrochemical Society) ; v. 2002-11.".
- 2002111727 isPartOf "Proceedings ; v. 2002-11.".
- 2002111727 issued "2002".
- 2002111727 issued "c2002.".
- 2002111727 language "eng".
- 2002111727 publisher "Pennington, NJ : Electrochemical Society,".
- 2002111727 subject "621.3815 22".
- 2002111727 subject "Integrated circuits Design and construction Congresses.".
- 2002111727 subject "Manufacturing processes Congresses.".
- 2002111727 subject "TK7874 .I47376 2002".
- 2002111727 title "Rapid thermal and other short-time processing technologies III : proceedings of the International Symposium / editors, P.J. Timans ... [et al.].".
- 2002111727 type "text".