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- 2002116918 alternative "Plasma process induced-damage".
- 2002116918 alternative "Plasma- and process-induced damage".
- 2002116918 alternative "P²ID".
- 2002116918 contributor B9261394.
- 2002116918 contributor B9261395.
- 2002116918 contributor B9261396.
- 2002116918 created "c2003.".
- 2002116918 date "2003".
- 2002116918 date "c2003.".
- 2002116918 dateCopyrighted "c2003.".
- 2002116918 description "Includes bibliographical references and author index.".
- 2002116918 extent "[vi], 189 p. :".
- 2002116918 identifier "0780377478 (softbound ed.)".
- 2002116918 identifier 2002116918.html.
- 2002116918 issued "2003".
- 2002116918 issued "c2003.".
- 2002116918 language "eng".
- 2002116918 publisher "Pisctaway, N.J. : IEEE,".
- 2002116918 subject "621.3815/2 22".
- 2002116918 subject "Plasma radiation Congresses.".
- 2002116918 subject "Semiconductor wafers Congresses.".
- 2002116918 subject "Semiconductors Effect of radiation on Congresses.".
- 2002116918 subject "TK7871.85 .I5834 2003".
- 2002116918 title "2003 8th International Symposium on Plasma- and Process-Induced Damage : April 24-25, 2003, Corbeil-Essonnes, France / Koji Eriguchi, S. Krishnan, and Terence Hook, editors ; [technical co-sponsors, IEEE/Electron Devices Society, Japanese Society of Applied Physics].".
- 2002116918 title "Plasma process induced-damage".
- 2002116918 title "Plasma- and process-induced damage".
- 2002116918 title "P²ID".
- 2002116918 type "text".