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- 2002141577 contributor B9262305.
- 2002141577 created "c2002.".
- 2002141577 date "2002".
- 2002141577 date "c2002.".
- 2002141577 dateCopyrighted "c2002.".
- 2002141577 description "Includes bibliographical references and indexes.".
- 2002141577 extent "1 v. (various pagings) :".
- 2002141577 identifier "1558996060".
- 2002141577 identifier 2002141577-d.html.
- 2002141577 isPartOf "Materials Research Society symposia proceedings ; v. 670.".
- 2002141577 isPartOf "Materials Research Society symposium proceedings ; v. 670".
- 2002141577 issued "2002".
- 2002141577 issued "c2002.".
- 2002141577 language "eng".
- 2002141577 publisher "Warrendale, Pa. : Materials Research Society,".
- 2002141577 subject "621.39/5 21".
- 2002141577 subject "Electric leakage Congresses.".
- 2002141577 subject "Gate array circuits Congresses.".
- 2002141577 subject "Integrated circuits Ultra large scale integration Materials Congresses.".
- 2002141577 subject "Silicides Congresses.".
- 2002141577 subject "TK7874.76 .G3823 2002".
- 2002141577 title "Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A. / editors, S.A. Campbell ... [et al.].".
- 2002141577 type "text".