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- 2002265337 contributor B9271101.
- 2002265337 contributor B9271102.
- 2002265337 created "c2001.".
- 2002265337 date "2001".
- 2002265337 date "c2001.".
- 2002265337 dateCopyrighted "c2001.".
- 2002265337 description "Includes bibliographical references and author index.".
- 2002265337 extent "x, 486 p. :".
- 2002265337 identifier "0819442852".
- 2002265337 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4557.".
- 2002265337 isPartOf "SPIE proceedings series ; v. 4557".
- 2002265337 issued "2001".
- 2002265337 issued "c2001.".
- 2002265337 language "eng".
- 2002265337 publisher "Bellingham, Washington : SPIE,".
- 2002265337 subject "621.3815/2 21".
- 2002265337 subject "Electromechanical devices Design and construction Congresses.".
- 2002265337 subject "Microfabrication Congresses.".
- 2002265337 subject "Micromachining Congresses.".
- 2002265337 subject "TJ1191.5 .M552432 2001".
- 2002265337 title "Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, [California] USA / Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) ... [et al.].".
- 2002265337 type "text".