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- 2002265434 contributor B9271215.
- 2002265434 contributor B9271216.
- 2002265434 created "c2001.".
- 2002265434 date "2001".
- 2002265434 date "c2001.".
- 2002265434 dateCopyrighted "c2001.".
- 2002265434 description "Includes bibliographic references and author index.".
- 2002265434 extent "xvi, 558 p. :".
- 2002265434 identifier "0819441090".
- 2002265434 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4408.".
- 2002265434 isPartOf "SPIE proceedings series ; v. 4408".
- 2002265434 issued "2001".
- 2002265434 issued "c2001.".
- 2002265434 language "eng".
- 2002265434 publisher "Bellingham, Washington : SPIE,".
- 2002265434 subject "621.381 21".
- 2002265434 subject "Microelectromechanical systems Congresses.".
- 2002265434 subject "Microelectronic packaging Congresses.".
- 2002265434 subject "Micromachining Congresses.".
- 2002265434 subject "Optoelectronic devices Congresses.".
- 2002265434 subject "TK7875 .D47598 2001".
- 2002265434 title "Design, test, integration and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France / Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.].".
- 2002265434 type "text".