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- 2002265872 contributor B9271783.
- 2002265872 contributor B9271784.
- 2002265872 created "c2001.s".
- 2002265872 date "2001".
- 2002265872 date "c2001.s".
- 2002265872 dateCopyrighted "c2001.s".
- 2002265872 description "Includes bibliographical references and index.".
- 2002265872 extent "xxx, 152 p. :".
- 2002265872 identifier "0819439622".
- 2002265872 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4284.".
- 2002265872 isPartOf "SPIE proceedings series ; v. 4284".
- 2002265872 issued "2001".
- 2002265872 issued "c2001.s".
- 2002265872 language "eng".
- 2002265872 publisher "Bellingham, Wash. : SPIE,".
- 2002265872 subject "621.381 21".
- 2002265872 subject "Microelectromechanical systems Congresses.".
- 2002265872 subject "Microelectronic packaging Congresses.".
- 2002265872 subject "Optoelectronic devices Congresses.".
- 2002265872 subject "TK8300 .F85 2001".
- 2002265872 title "Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA / Michael R. Descour, Juha T. Rantala, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 2002265872 type "text".