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- 2002276015 contributor B9273120.
- 2002276015 created "c2002.".
- 2002276015 date "2002".
- 2002276015 date "c2002.".
- 2002276015 dateCopyrighted "c2002.".
- 2002276015 description "Includes bibliographical references and index.".
- 2002276015 extent "xiv, 316 p. :".
- 2002276015 identifier "0201444941".
- 2002276015 isPartOf "Modular series on solid state devices (Upper Saddle River, N.J.) ; v. 5.".
- 2002276015 isPartOf "Modular series on solid state devices ; v. 5".
- 2002276015 issued "2002".
- 2002276015 issued "c2002.".
- 2002276015 language "eng".
- 2002276015 publisher "Upper Saddle River, N.J. : Prentice Hall,".
- 2002276015 subject "621.39/5 21".
- 2002276015 subject "Integrated circuits Very large scale integration Design and construction Textbooks.".
- 2002276015 subject "TK7874 .J33 2002".
- 2002276015 title "Introduction to microelectronic fabrication / Richard C. Jaeger.".
- 2002276015 type "text".