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- 2002276117 contributor B9273243.
- 2002276117 contributor B9273244.
- 2002276117 created "c1997.".
- 2002276117 date "1997".
- 2002276117 date "c1997.".
- 2002276117 dateCopyrighted "c1997.".
- 2002276117 description "Includes bibliographical references and index.".
- 2002276117 extent "xi, 398 p. :".
- 2002276117 identifier "0819426806 (pbk.)".
- 2002276117 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3242.".
- 2002276117 isPartOf "SPIE proceedings series ; v. 3242".
- 2002276117 issued "1997".
- 2002276117 issued "c1997.".
- 2002276117 language "eng".
- 2002276117 publisher "Bellingham, Wash., USA : SPIE,".
- 2002276117 subject "621.381 21".
- 2002276117 subject "Electromechanical devices Congresses.".
- 2002276117 subject "Microelectronics Materials Congresses.".
- 2002276117 subject "Smart materials Congresses.".
- 2002276117 subject "TK7874 .S573 1997".
- 2002276117 title "Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia / Ahsan Hariz, Vijay K. Varadan, Olaf Reinhold, chairs/editors ; sponsored by University of South Australia ... [et al.].".
- 2002276117 type "text".