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- 2002277006 contributor B9274243.
- 2002277006 contributor B9274244.
- 2002277006 contributor B9274245.
- 2002277006 created "c2001.".
- 2002277006 date "2001".
- 2002277006 date "c2001.".
- 2002277006 dateCopyrighted "c2001.".
- 2002277006 description "Includes bibliographical references and index.".
- 2002277006 extent "xi, 212 p. :".
- 2002277006 identifier "0819443395".
- 2002277006 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4600.".
- 2002277006 isPartOf "SPIE proceedings series ; v. 4600".
- 2002277006 issued "2001".
- 2002277006 issued "c2001.".
- 2002277006 language "eng".
- 2002277006 publisher "Bellingham, Wash. : SPIE,".
- 2002277006 subject "621.381 21".
- 2002277006 subject "Integrated circuits Congresses.".
- 2002277006 subject "Microelectronics Technological innovations Congresses.".
- 2002277006 subject "Optoelectronic devices Technological innovations Congresses.".
- 2002277006 subject "TK7874 .I47177 2001".
- 2002277006 title "Advances in microelectronic device technology : 7-9 November 2001, Nanjing, China / Qin-Yi Tong, Ulrich M. Goesele, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU--Southeast University (China), [and] COEMA--China Optics and Optoelectronics Manufacturers Association ; cooperating organizations, Electronic Society, Jiangsu Province (China) [and] Laser and Optical Engineering Society, Jiangsu Province (China).".
- 2002277006 type "text".