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- 2002277171 contributor B9274418.
- 2002277171 contributor B9274419.
- 2002277171 created "c2001.".
- 2002277171 date "2001".
- 2002277171 date "c2001.".
- 2002277171 dateCopyrighted "c2001.".
- 2002277171 description "Includes bibliographical references and index.".
- 2002277171 extent "x, 324 p. :".
- 2002277171 identifier "0819441546".
- 2002277171 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4440.".
- 2002277171 isPartOf "SPIE proceedings series ; v. 4440".
- 2002277171 issued "2001".
- 2002277171 issued "c2001.".
- 2002277171 language "eng".
- 2002277171 publisher "Bellingham, Wash., USA : SPIE,".
- 2002277171 subject "681/.4 21".
- 2002277171 subject "Lenses Design and construction Congresses.".
- 2002277171 subject "Microlithography Congresses.".
- 2002277171 subject "Micromachining Congresses.".
- 2002277171 subject "Optical instruments Design and construction Congresses.".
- 2002277171 subject "TS510 .L577 2001".
- 2002277171 title "Lithographic and micromachining techniques for optical component fabrication : 29-30 July 2001, San Diego, USA / Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 2002277171 type "text".