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- 2002277286 alternative "MEMS--2001".
- 2002277286 contributor B9274572.
- 2002277286 contributor B9274573.
- 2002277286 contributor B9274574.
- 2002277286 created "c2001.".
- 2002277286 date "2001".
- 2002277286 date "c2001.".
- 2002277286 dateCopyrighted "c2001.".
- 2002277286 description "Includes bibliographic references and author index.".
- 2002277286 extent "xii, 892 p. :".
- 2002277286 identifier "0791835553".
- 2002277286 isPartOf "MEMS (Series) (American Society of Mechanical Engineers) ; v. 3.".
- 2002277286 isPartOf "MEMS ; vol. 3".
- 2002277286 issued "2001".
- 2002277286 issued "c2001.".
- 2002277286 language "eng".
- 2002277286 publisher "New York, N.Y. : American Society of Mechanical Engineers,".
- 2002277286 subject "621.381 21".
- 2002277286 subject "Fluidic devices Congresses.".
- 2002277286 subject "Microelectromechanical systems Congresses.".
- 2002277286 subject "TK7875 .M53 2001".
- 2002277286 title "MEMS--2001".
- 2002277286 title "Micro-electro-mechanical systems (MEMS)--2001 : presented at the 2001 ASME International Mechanical Engineering Congress and Exposition : November 11-16, 2001, New York, New York / sponsored by the MEMS Subdivision, ASME ... [et al.] ; edited by Abraham P. Lee ... [et al.].".
- 2002277286 type "text".