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- 2002277513 contributor B9274868.
- 2002277513 contributor B9274869.
- 2002277513 created "c2001.".
- 2002277513 date "2001".
- 2002277513 date "c2001.".
- 2002277513 dateCopyrighted "c2001.".
- 2002277513 description "Includes bibliographic references and author index.".
- 2002277513 extent "ix, 242 p. :".
- 2002277513 identifier "0819441074".
- 2002277513 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 4406".
- 2002277513 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4406.".
- 2002277513 issued "2001".
- 2002277513 issued "c2001.".
- 2002277513 language "eng".
- 2002277513 publisher "Bellingham, Washington : SPIE,".
- 2002277513 subject "621.381 21".
- 2002277513 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 2002277513 subject "Manufacturing processes Congresses.".
- 2002277513 subject "Microelectronics Materials Congresses.".
- 2002277513 subject "Semiconductors Design and construction Congresses.".
- 2002277513 subject "TK7874.75 .I445 2001".
- 2002277513 title "In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK / Gudrun Kissinger, Larg H. Weiland, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK).".
- 2002277513 type "text".