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- 2002277514 alternative "Mask technology for integrated circuits and microcomponents".
- 2002277514 contributor B9274870.
- 2002277514 contributor B9274871.
- 2002277514 contributor B9274872.
- 2002277514 created "c2001.".
- 2002277514 date "2001".
- 2002277514 date "c2001.".
- 2002277514 dateCopyrighted "c2001.".
- 2002277514 description "Includes bibliographic references and author index.".
- 2002277514 extent "x, 192 p. :".
- 2002277514 identifier "0819440396".
- 2002277514 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4349.".
- 2002277514 isPartOf "SPIE proceedings series ; v. 4349".
- 2002277514 issued "2001".
- 2002277514 issued "c2001.".
- 2002277514 language "eng".
- 2002277514 publisher "Bellingham, Washington : SPIE,".
- 2002277514 subject "621.3815 21".
- 2002277514 subject "Integrated circuits Masks Congresses.".
- 2002277514 subject "Microlithography Congresses.".
- 2002277514 subject "TK7872.M3 E97 2000".
- 2002277514 title "17th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 13-14 November 2000, Munich, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM) (Germany) ; published by, SPIE--The International Society for Optical Engineering.".
- 2002277514 title "Mask technology for integrated circuits and microcomponents".
- 2002277514 type "text".