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- 2002279639 contributor B9277568.
- 2002279639 contributor B9277569.
- 2002279639 created "c2001.".
- 2002279639 date "2001".
- 2002279639 date "c2001.".
- 2002279639 dateCopyrighted "c2001.".
- 2002279639 description "Includes bibliographic references and author index.".
- 2002279639 extent "ix, 322 p. :".
- 2002279639 identifier "0819443239".
- 2002279639 isPartOf "Proceedings of SPIE ; v. 4593".
- 2002279639 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4593.".
- 2002279639 issued "2001".
- 2002279639 issued "c2001.".
- 2002279639 language "eng".
- 2002279639 publisher "Bellingham, Wash. : SPIE,".
- 2002279639 subject "621.381 21".
- 2002279639 subject "Microelectromechanical systems Design and construction Congresses.".
- 2002279639 subject "Microelectronic packaging Congresses.".
- 2002279639 subject "TK7875 .D462 2001".
- 2002279639 title "Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia / Paul D. Frnazon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization IEEE South Australia Section.".
- 2002279639 type "text".