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- 2002280022 contributor B9278050.
- 2002280022 contributor B9278051.
- 2002280022 created "c2001.".
- 2002280022 date "2001".
- 2002280022 date "c2001.".
- 2002280022 dateCopyrighted "c2001.".
- 2002280022 description "Includes bibliographic references and author index.".
- 2002280022 extent "ix, 294 p. :".
- 2002280022 identifier "0819441635 (pbk.)".
- 2002280022 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4449.".
- 2002280022 isPartOf "SPIE proceedings series, 0277-786X ; v. 4449".
- 2002280022 issued "2001".
- 2002280022 issued "c2001.".
- 2002280022 language "eng".
- 2002280022 publisher "Bellingham, Wash., USA : SPIE,".
- 2002280022 subject "621.381/045 21".
- 2002280022 subject "Information retrieval Technological innovations Congresses.".
- 2002280022 subject "Optical measurements Industrial applications Congresses.".
- 2002280022 subject "Optoelectronic devices Industrial applications Congresses.".
- 2002280022 subject "Optoelectronics Congresses.".
- 2002280022 subject "Surfaces (Technology) Measurement Congresses.".
- 2002280022 subject "TA1750 .O552 2001".
- 2002280022 title "Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August, 2001, San Diego, USA / Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 2002280022 type "text".