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- 2002282193 contributor B9280677.
- 2002282193 created "c2001.".
- 2002282193 date "2001".
- 2002282193 date "c2001.".
- 2002282193 dateCopyrighted "c2001.".
- 2002282193 description "Includes bibliographical references and index.".
- 2002282193 extent "xi, 440 p. :".
- 2002282193 identifier "0819443409".
- 2002282193 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4601.".
- 2002282193 isPartOf "SPIE proceedings series, 0277-786X ; v. 4601".
- 2002282193 issued "2001".
- 2002282193 issued "c2001.".
- 2002282193 language "eng".
- 2002282193 publisher "Bellingham, Wash., USA : SPIE,".
- 2002282193 subject "671.3/5 21".
- 2002282193 subject "Electromechanical devices Design and construction Congresses.".
- 2002282193 subject "Microfabrication Congresses.".
- 2002282193 subject "Micromachining Congresses.".
- 2002282193 subject "TJ1191.5 .M5524324 2001".
- 2002282193 title "Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China / Norman C. Tien, Qing-An Huang, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU--Southeast University (China), [and] COEMA--China Optics and Optoelectronics Manufacturers Association ; cooperating organizations, Electronic Society, Jiangsu Province (China) [and] Laser and Optical Engineering Society, Jiangsu Province (China).".
- 2002282193 type "text".