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- 2002284444 contributor B9283491.
- 2002284444 contributor B9283490.
- 2002284444 created "c2002.".
- 2002284444 date "2002".
- 2002284444 date "c2002.".
- 2002284444 dateCopyrighted "c2002.".
- 2002284444 description "Includes bibliographical references and indexes.".
- 2002284444 extent "xiii, 338 p. :".
- 2002284444 identifier "1558996419".
- 2002284444 identifier 2002284444-d.html.
- 2002284444 identifier 2002284444.html.
- 2002284444 isPartOf "Materials Research Society symposia proceedings ; v. 705.".
- 2002284444 isPartOf "Materials Research Society symposium proceedings ; v. 705".
- 2002284444 issued "2002".
- 2002284444 issued "c2002.".
- 2002284444 language "eng".
- 2002284444 publisher "Warrendale, Pa. : Materials Research Society,".
- 2002284444 subject "620/.5 22".
- 2002284444 subject "Biotechnology Congresses.".
- 2002284444 subject "Integrated circuits Ultra large scale integration Congresses.".
- 2002284444 subject "Microlithography Congresses.".
- 2002284444 subject "Nanostructures Congresses.".
- 2002284444 subject "Nanotechnology Congresses.".
- 2002284444 subject "QC176.8.N35 S95 2001".
- 2002284444 title "Nanopatterning--from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. / editors, Lhadi Merhari ... [et al.].".
- 2002284444 type "text".