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- 2002510725 contributor B9459964.
- 2002510725 contributor B9459965.
- 2002510725 contributor B9459963.
- 2002510725 created "c2002.".
- 2002510725 date "2002".
- 2002510725 date "c2002.".
- 2002510725 dateCopyrighted "c2002.".
- 2002510725 description "Includes bibliographical references and indexes.".
- 2002510725 extent "xi, 280 p. :".
- 2002510725 identifier "1558996222".
- 2002510725 identifier 2002510725-d.html.
- 2002510725 isPartOf "Materials Research Society symposia proceedings ; v. 686.".
- 2002510725 isPartOf "Materials Research Society symposium proceedings ; v. 686".
- 2002510725 issued "2002".
- 2002510725 issued "c2002.".
- 2002510725 language "eng".
- 2002510725 publisher "Warrendale, PA : Materials Research Society,".
- 2002510725 subject "620.1/93 21".
- 2002510725 subject "Dielectrics Congresses.".
- 2002510725 subject "Integrated circuits Materials Congresses.".
- 2002510725 subject "Logic circuits Congresses.".
- 2002510725 subject "Semiconductors Materials Congresses.".
- 2002510725 subject "Silicon Optical properties Congresses.".
- 2002510725 subject "TK7871.15.S55 S96 2002".
- 2002510725 title "Materials issues in novel Si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A. / editors, William G. En ... [et al.].".
- 2002510725 type "text".