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- 2002512448 alternative "Smart electronics, MEMS, and nanotechnology".
- 2002512448 contributor B9462117.
- 2002512448 contributor B9462118.
- 2002512448 created "c2002.".
- 2002512448 date "2002".
- 2002512448 date "c2002.".
- 2002512448 dateCopyrighted "c2002.".
- 2002512448 description "Includes bibliographical references and index.".
- 2002512448 extent "viii, 360 p. :".
- 2002512448 identifier "0819444480".
- 2002512448 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4700.".
- 2002512448 isPartOf "SPIE proceedings series, 0277-786X ; v. 4700".
- 2002512448 issued "2002".
- 2002512448 issued "c2002.".
- 2002512448 language "eng".
- 2002512448 publisher "Bellingham, Wash., USA : SPIE,".
- 2002512448 subject "Actuators Congresses.".
- 2002512448 subject "Microelectromechanical systems Congresses.".
- 2002512448 subject "Microelectronics Materials Congresses.".
- 2002512448 subject "Nanotechnology Congresses.".
- 2002512448 subject "Smart materials Congresses.".
- 2002512448 subject "TK7874 .S592 2002".
- 2002512448 title "Smart electronics, MEMS, and nanotechnology".
- 2002512448 title "Smart structures and materials 2002. Smart electronics, MEMS, and nanotechnology : 18-20 March 2002, San Diego, USA / Vijay K. Varadan, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by ASME--American Society for Mechanical Engineers ... [et al.] ; cooperating organizations, Air Force Office of Scientific Research (USA) ... [et al.].".
- 2002512448 type "text".