Matches in Library of Congress for { <http://lccn.loc.gov/2002512515> ?p ?o. }
Showing items 1 to 24 of
24
with 100 items per page.
- 2002512515 contributor B9462199.
- 2002512515 contributor B9462200.
- 2002512515 created "c2002.".
- 2002512515 date "2002".
- 2002512515 date "c2002.".
- 2002512515 dateCopyrighted "c2002.".
- 2002512515 description "Includes bibliographical references and index.".
- 2002512515 extent "xv, 628 p. :".
- 2002512515 identifier "0819444391".
- 2002512515 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4692.".
- 2002512515 isPartOf "SPIE proceedings series, 0277-786X ; v. 4692".
- 2002512515 issued "2002".
- 2002512515 issued "c2002.".
- 2002512515 language "eng".
- 2002512515 publisher "Bellingham, Wash. : SPIE,".
- 2002512515 subject "Integrated circuits Defects Analysis Congresses.".
- 2002512515 subject "Integrated circuits Design and construction Congresses.".
- 2002512515 subject "Microelectronics industry Quality control Congresses.".
- 2002512515 subject "Quality control Congresses.".
- 2002512515 subject "Semiconductor wafers Defects Analysis Congresses.".
- 2002512515 subject "Semiconductors Characterization Congresses.".
- 2002512515 subject "TK7874 .D4747 2002".
- 2002512515 title "Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA / Alexander Starikov, Kenneth W. Tobin, Jr., chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 2002512515 type "text".