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- 2002634045 contributor B9495060.
- 2002634045 contributor B9495061.
- 2002634045 contributor B9495062.
- 2002634045 created "c2000.".
- 2002634045 date "2000".
- 2002634045 date "c2000.".
- 2002634045 dateCopyrighted "c2000.".
- 2002634045 description "Includes bibliographical references.".
- 2002634045 extent "201 p. :".
- 2002634045 identifier "3800725878 (pbk.)".
- 2002634045 isPartOf "GMM-Fachbericht, 1432-3419 ; 32".
- 2002634045 issued "2000".
- 2002634045 issued "c2000.".
- 2002634045 language "eng".
- 2002634045 publisher "Berlin : VDE-Verlag,".
- 2002634045 subject "621.3815 22".
- 2002634045 subject "Integrated circuits Masks Congresses.".
- 2002634045 subject "Microlithography Congresses.".
- 2002634045 subject "TK7872.M3 E97 2000b".
- 2002634045 subject "X-ray lithography Congresses.".
- 2002634045 title "EMC 2000 : 17th European Mask Conference on Mask Technology for Integrated Circuits and Micro-components : lectures held at the GMM-Conference, November 13-14, 2000 in Munich-Unterhaching, Germany / conference chairperson, Uwe Behringer ; organizer, VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) ; in cooperation with Semiconductor Equipment and Materials International, Europe (SEMI-Europe) ... [et al.].".
- 2002634045 type "text".