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- 2003018016 contributor B9517441.
- 2003018016 contributor B9517442.
- 2003018016 created "c2004.".
- 2003018016 date "2004".
- 2003018016 date "c2004.".
- 2003018016 dateCopyrighted "c2004.".
- 2003018016 description "Includes bibliographical references and index.".
- 2003018016 extent "xiv, 518 p. :".
- 2003018016 identifier "0815514832 (alk. paper)".
- 2003018016 identifier 2003018016-d.html.
- 2003018016 identifier 2003018016.html.
- 2003018016 issued "2004".
- 2003018016 issued "c2004.".
- 2003018016 language "eng".
- 2003018016 publisher "Norwich, NY : William Andrew Pub. ; Heidelberg : Springer,".
- 2003018016 subject "621.3815/2 22".
- 2003018016 subject "Cathode sputtering (Plating process)".
- 2003018016 subject "TS695 .W38 2004".
- 2003018016 subject "Thin films.".
- 2003018016 title "Thin film materials technology : sputtering of compound materials / by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.".
- 2003018016 type "text".