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- 2003045497 contributor B9535575.
- 2003045497 created "2003.".
- 2003045497 date "2003".
- 2003045497 date "2003.".
- 2003045497 dateCopyrighted "2003.".
- 2003045497 description "Includes bibliographical references.".
- 2003045497 extent "xii, 211 :".
- 2003045497 identifier "354000856X (alk. paper)".
- 2003045497 identifier 2003045497-d.html.
- 2003045497 identifier 2003045497-t.html.
- 2003045497 isPartOf "Microtechnology and MEMS".
- 2003045497 issued "2003".
- 2003045497 issued "2003.".
- 2003045497 language "eng".
- 2003045497 publisher "Berlin ; New York : Springer,".
- 2003045497 subject "620/.5 21".
- 2003045497 subject "Microelectromechanical systems.".
- 2003045497 subject "Nanotechnology.".
- 2003045497 subject "T174.7 .F85 2003".
- 2003045497 title "Micromachines as tools for nanotechnology / H. Fujita (ed.)".
- 2003045497 type "text".