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- 2003050541 contributor B9541115.
- 2003050541 contributor B9541116.
- 2003050541 created "c2003.".
- 2003050541 date "2003".
- 2003050541 date "c2003.".
- 2003050541 dateCopyrighted "c2003.".
- 2003050541 description "Includes bibliographical references (p. [249]-261) and index.".
- 2003050541 extent "x, 269 p. :".
- 2003050541 identifier "3540002529 (alk. paper)".
- 2003050541 identifier 2003050541-d.html.
- 2003050541 identifier 2003050541-t.html.
- 2003050541 isPartOf "Microtechnology and MEMS, 1615-8326".
- 2003050541 issued "2003".
- 2003050541 issued "c2003.".
- 2003050541 language "eng".
- 2003050541 publisher "Berlin ; New York : Springer,".
- 2003050541 subject "621.381 21".
- 2003050541 subject "Integrated circuits Mathematical models.".
- 2003050541 subject "Microelectromechanical systems Mathematical models.".
- 2003050541 subject "Microelectronics Mathematical models.".
- 2003050541 subject "TK7836 .N35 2003".
- 2003050541 title "Modelling of microfabrication systems / Raja Nassar, Weizhong Dai.".
- 2003050541 type "text".