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- 2003065275 contributor B9556627.
- 2003065275 contributor B9556628.
- 2003065275 created "c2004.".
- 2003065275 date "2004".
- 2003065275 date "c2004.".
- 2003065275 dateCopyrighted "c2004.".
- 2003065275 description "Includes bibliographical references (p. [91]-99) and index.".
- 2003065275 extent "xvi, 102 p. :".
- 2003065275 identifier "1402076886".
- 2003065275 identifier 2003065275-d.html.
- 2003065275 issued "2004".
- 2003065275 issued "c2004.".
- 2003065275 language "eng".
- 2003065275 publisher "Boston : Kluwer Academic Publishers,".
- 2003065275 subject "621.3815/2 22".
- 2003065275 subject "Chemical vapor deposition.".
- 2003065275 subject "TS695 .F67 2004".
- 2003065275 subject "Thin films.".
- 2003065275 title "Chemical vapor deposition polymerization : the growth and properties of parylene thin films / by Jeffrey B. Fortin, Toh-Ming Lu.".
- 2003065275 type "text".