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- 2003100710 contributor B9564289.
- 2003100710 contributor B9564290.
- 2003100710 contributor B9564291.
- 2003100710 created "c2003.".
- 2003100710 date "2003".
- 2003100710 date "c2003.".
- 2003100710 dateCopyrighted "c2003.".
- 2003100710 description "Includes bibliographical references and indexes.".
- 2003100710 extent "xii, 636 p. :".
- 2003100710 identifier "1566773474".
- 2003100710 isPartOf "Proceedings (Electrochemical Society) ; v. 2003-02.".
- 2003100710 isPartOf "Proceedings ; v. 2003-02".
- 2003100710 issued "2003".
- 2003100710 issued "c2003.".
- 2003100710 language "eng".
- 2003100710 publisher "Pennington, NJ : Electrochemical Society,".
- 2003100710 subject "621.3815/2 20".
- 2003100710 subject "Electric insulators and insulation Thin films Congresses.".
- 2003100710 subject "Silica Congresses.".
- 2003100710 subject "Silicon nitride Congresses.".
- 2003100710 subject "TK7872.T55 S94 2003".
- 2003100710 subject "Thin film devices Congresses.".
- 2003100710 title "Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium / editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielectric Science and Technology, Electronics.".
- 2003100710 type "text".