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- 2003100866 alternative "ULSI process integration three".
- 2003100866 contributor B9564438.
- 2003100866 contributor B9564439.
- 2003100866 contributor B9564440.
- 2003100866 created "c2003.".
- 2003100866 date "2003".
- 2003100866 date "c2003.".
- 2003100866 dateCopyrighted "c2003.".
- 2003100866 description "Includes bibliographical references and indexes.".
- 2003100866 extent "xvii, 598 p. :".
- 2003100866 identifier "1566773768".
- 2003100866 isPartOf "Proceedings (Electrochemical Society) ; v. 2003-06.".
- 2003100866 isPartOf "Proceedings ; v. 2003-06".
- 2003100866 issued "2003".
- 2003100866 issued "c2003.".
- 2003100866 language "eng".
- 2003100866 publisher "Pennington, NJ : Electrochemical Society,".
- 2003100866 subject "621.39/5 21".
- 2003100866 subject "Integrated circuits Ultra large scale integration Congresses.".
- 2003100866 subject "TK7874.76 .U476 2003".
- 2003100866 title "ULSI process integration III : proceedings of the international symposium / editors, C.L. Claeys ... [et al.] ; sponsoring division, Electronics.".
- 2003100866 title "ULSI process integration three".
- 2003100866 type "text".