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- 2003103049 alternative "Advanced Thermal Processing of Semiconductors, 2003, RTP 2003, 11th IEEE International Conference on.".
- 2003103049 alternative "Advanced thermal processing of semiconductors".
- 2003103049 contributor B9566058.
- 2003103049 contributor B9566059.
- 2003103049 contributor B9566060.
- 2003103049 created "c2003.".
- 2003103049 date "2003".
- 2003103049 date "c2003.".
- 2003103049 dateCopyrighted "c2003.".
- 2003103049 description "Includes bibliographical references.".
- 2003103049 extent "xi, 220 p. :".
- 2003103049 hasFormat "Also available via the World Wide Web with additional title: Advanced Thermal Processing of Semiconductors, 2003, RTP 2003, 11th IEEE International Conference on.".
- 2003103049 identifier "0780378741".
- 2003103049 identifier opac?punumber=8835.
- 2003103049 isFormatOf "Also available via the World Wide Web with additional title: Advanced Thermal Processing of Semiconductors, 2003, RTP 2003, 11th IEEE International Conference on.".
- 2003103049 issued "2003".
- 2003103049 issued "c2003.".
- 2003103049 language "eng".
- 2003103049 publisher "Piscataway, N.J. : IEEE,".
- 2003103049 relation "Also available via the World Wide Web with additional title: Advanced Thermal Processing of Semiconductors, 2003, RTP 2003, 11th IEEE International Conference on.".
- 2003103049 subject "Rapid thermal processing Congresses.".
- 2003103049 subject "Semiconductor doping Congresses.".
- 2003103049 subject "Semiconductors Defects Congresses.".
- 2003103049 subject "Semiconductors Heat treatment Congresses.".
- 2003103049 subject "TK7871.85 .I5743 2003".
- 2003103049 title "Advanced thermal processing of semiconductors".
- 2003103049 title "RTP 2003 : 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC / editors, J. Gelpey ... [et al.] ; IEEE EDS.".
- 2003103049 type "text".