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- 2003111108 contributor B9572585.
- 2003111108 contributor B9572586.
- 2003111108 contributor B9572587.
- 2003111108 created "2003.".
- 2003111108 date "2003".
- 2003111108 date "2003.".
- 2003111108 dateCopyrighted "2003.".
- 2003111108 description "Includes bibliographical references and index.".
- 2003111108 extent "xviii, 818 p. :".
- 2003111108 identifier "0735401527".
- 2003111108 identifier 2003111108-d.html.
- 2003111108 isPartOf "AIP conference proceedings ; no. 683.".
- 2003111108 isPartOf "AIP conference proceedings, 0094-243X ; v. 683".
- 2003111108 issued "2003".
- 2003111108 issued "2003.".
- 2003111108 language "eng".
- 2003111108 publisher "Melville, N.Y. : American Institute of Physics,".
- 2003111108 subject "621.39/5 22".
- 2003111108 subject "Integrated circuits Ultra large scale integration Congresses Software.".
- 2003111108 subject "Integrated circuits Ultra large scale integration Congresses.".
- 2003111108 subject "TK7874.76 .I56 2003".
- 2003111108 title "Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March, 2003 / editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.].".
- 2003111108 type "text".