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- 2003265092 alternative "MOEMS technologies and applications".
- 2003265092 contributor B9577475.
- 2003265092 contributor B9577476.
- 2003265092 created "c2002.".
- 2003265092 date "2002".
- 2003265092 date "c2002.".
- 2003265092 dateCopyrighted "c2002.".
- 2003265092 description "Includes bibliographic references and author index.".
- 2003265092 extent "ix, 302 p. :".
- 2003265092 identifier "081944717X".
- 2003265092 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4928.".
- 2003265092 isPartOf "SPIE proceedings series ; v. 4928".
- 2003265092 issued "2002".
- 2003265092 issued "c2002.".
- 2003265092 language "eng".
- 2003265092 publisher "Bellingham, Washington : SPIE,".
- 2003265092 subject "621.381 21".
- 2003265092 subject "Microelectromechanical systems Congresses.".
- 2003265092 subject "Optoelectronic devices Congresses.".
- 2003265092 subject "TK7875 .M4538 2002".
- 2003265092 title "MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China / Guofan Jin, John S. McKillop, Kazuhiro Hane, chairs/editors ; sponsored by, SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Shanghai Jiaotong University (China) ... [et al.] ; supported by, National Natural Science Foundation of China ... [et al.] ; published by, SPIE--the International Society for Optical Engineering.".
- 2003265092 title "MOEMS technologies and applications".
- 2003265092 type "text".