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- 2003266595 contributor B9579334.
- 2003266595 contributor B9579335.
- 2003266595 created "c2002.".
- 2003266595 date "2002".
- 2003266595 date "c2002.".
- 2003266595 dateCopyrighted "c2002.".
- 2003266595 description "Includes bibliographical references and index.".
- 2003266595 extent "v, 104 p. :".
- 2003266595 identifier "0819443867".
- 2003266595 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4647.".
- 2003266595 isPartOf "SPIE proceedings series, 0277-786X ; v. 4647".
- 2003266595 issued "2002".
- 2003266595 issued "c2002.".
- 2003266595 language "eng".
- 2003266595 publisher "Bellingham, Wash., USA : SPIE,".
- 2003266595 subject "Microelectromechanical systems Congresses.".
- 2003266595 subject "Microelectronic packaging Congresses.".
- 2003266595 subject "Optoelectronic devices Congresses.".
- 2003266595 subject "TK8300 .F852 2002".
- 2003266595 title "Functional integration of opto-electro-mechanical devices and systems II : 23-24 January 2002, San Jose, USA / Michael R. Descour, Juha T. Rantala, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 2003266595 type "text".