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- 2003268486 alternative "MEMS--2002".
- 2003268486 contributor B9581756.
- 2003268486 contributor B9581757.
- 2003268486 created "c2002.".
- 2003268486 date "2002".
- 2003268486 date "c2002.".
- 2003268486 dateCopyrighted "c2002.".
- 2003268486 description "Includes bibliographical references and author index.".
- 2003268486 extent "xii, 631 p. :".
- 2003268486 identifier "0791836428".
- 2003268486 isPartOf "MEMS (Series) (American Society of Mechanical Engineers) ; v. 4.".
- 2003268486 isPartOf "MEMS ; vol. 4".
- 2003268486 issued "2002".
- 2003268486 issued "c2002.".
- 2003268486 language "eng".
- 2003268486 publisher "New York, N.Y. : American Society of Mechanical Engineers,".
- 2003268486 subject "621.381 22".
- 2003268486 subject "Fluidic devices Congresses.".
- 2003268486 subject "Microelectromechanical systems Congresses.".
- 2003268486 subject "TK7875 .M5323 2002".
- 2003268486 title "MEMS--2002".
- 2003268486 title "Micro-electro-mechanical systems (MEMS)--2002 : presented at the 2002 ASME International Mechanical Engineering Congress and Exposition : November 17-22, 2002, New Orleans, Louisiana / co-sponsored by the MEMS Subdivision, ASME ... [et al.].".
- 2003268486 type "text".