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- 2003268804 alternative "Plasma process induced-damage".
- 2003268804 alternative "Plasma- and process-induced damage".
- 2003268804 alternative "P²ID".
- 2003268804 contributor B9582173.
- 2003268804 contributor B9582174.
- 2003268804 contributor B9582175.
- 2003268804 created "c2002.".
- 2003268804 date "2002".
- 2003268804 date "c2002.".
- 2003268804 dateCopyrighted "c2002.".
- 2003268804 description "Includes bibliographic references and author index.".
- 2003268804 extent "[6], i, 177 p. :".
- 2003268804 identifier "0965157776 (softbound)".
- 2003268804 identifier "0965157784 (CD-ROM)".
- 2003268804 issued "2002".
- 2003268804 issued "c2002.".
- 2003268804 language "eng".
- 2003268804 publisher "Santa Clara, California : AVS,".
- 2003268804 subject "621.3815/2 22".
- 2003268804 subject "Plasma radiation Congresses.".
- 2003268804 subject "Semiconductor wafers Congresses.".
- 2003268804 subject "Semiconductors Effect of radiation on Congresses.".
- 2003268804 subject "TK7871.85 .I5834 2002".
- 2003268804 title "2002 7th International Symposium on Plasma- and Process-Induced Damage : June 5-7, 2002, Maui, Hawaii, USA / Terence Hook, Koji Eriguchi, and Calvin T. Gabriel, editors ; technical co-sponsors, AVS, IEEE/Electron Devices Society, Japanese Society of Applied Physics.".
- 2003268804 title "Plasma process induced-damage".
- 2003268804 title "Plasma- and process-induced damage".
- 2003268804 title "P²ID".
- 2003268804 type "text".