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- 2003268907 contributor B9582324.
- 2003268907 contributor B9582325.
- 2003268907 created "c2002.".
- 2003268907 date "2002".
- 2003268907 date "c2002.".
- 2003268907 dateCopyrighted "c2002.".
- 2003268907 description "Includes bibliographical references and indexes.".
- 2003268907 extent "x, 278 p. :".
- 2003268907 identifier "0819443476".
- 2003268907 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4608.".
- 2003268907 isPartOf "SPIE proceedings series, 0277-786X ; v. 4608".
- 2003268907 issued "2002".
- 2003268907 issued "c2002.".
- 2003268907 language "eng".
- 2003268907 publisher "Bellingham, Wash. : SPIE-the International Society for Optical Engineering,".
- 2003268907 subject "620/.5 22".
- 2003268907 subject "Metrology Congresses.".
- 2003268907 subject "Microelectronics Congresses.".
- 2003268907 subject "Nanostructures Congresses.".
- 2003268907 subject "Nanotechnology Congresses.".
- 2003268907 subject "T174.7 .N359 2002".
- 2003268907 title "Nanostructure science, metrology, and technology : 5-7 September 2001, Gaithersburg, USA / Martin C. Peckerar, Michael T. Postek, Jr., chairs/editors.".
- 2003268907 type "text".