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- 2003278131 contributor B9593530.
- 2003278131 contributor B9593531.
- 2003278131 contributor B9593532.
- 2003278131 created "c2002.".
- 2003278131 date "2002".
- 2003278131 date "c2002.".
- 2003278131 dateCopyrighted "c2002.".
- 2003278131 description "Includes bibliographical references and author index.".
- 2003278131 extent "xi, 476 p. :".
- 2003278131 identifier "0819447315".
- 2003278131 isPartOf "Proceedings of SPIE, 0277-786X ; v. 4936".
- 2003278131 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4936.".
- 2003278131 issued "2002".
- 2003278131 issued "c2002.".
- 2003278131 language "eng".
- 2003278131 publisher "Bellingham, Wash., USA : SPIE,".
- 2003278131 subject "621.381 22".
- 2003278131 subject "Mechatronics Congresses.".
- 2003278131 subject "Microelectromechanical systems Congresses.".
- 2003278131 subject "Microelectronics Congresses.".
- 2003278131 subject "Nanotechnology Congresses.".
- 2003278131 subject "TK7874 .N314 2002".
- 2003278131 title "Nano- and microtechnology : materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia / Dinesh K. Sood, Ajay P. Malshe, Ryutaro Maeda, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by RMIT University (Australia) ... [et al.] ; cooperating organizations, Swinburne University of Technology (Australia) ... [et al.].".
- 2003278131 type "text".