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- 2003283097 contributor B9596337.
- 2003283097 contributor B9596338.
- 2003283097 created "c2002-".
- 2003283097 date "2002".
- 2003283097 date "c2002-".
- 2003283097 dateCopyrighted "c2002-".
- 2003283097 description "Includes bibliographies and indexes.".
- 2003283097 description "v. 1. Process technology".
- 2003283097 extent "v. <1 > :".
- 2003283097 identifier "0961672161 (v. 1)".
- 2003283097 issued "2002".
- 2003283097 issued "c2002-".
- 2003283097 language "eng".
- 2003283097 publisher "Sunset Beach, Calif. : Lattice Press,".
- 2003283097 subject "621.381/73 22".
- 2003283097 subject "Integrated circuits Very large scale integration.".
- 2003283097 subject "Semiconductors Etching.".
- 2003283097 subject "Silicon.".
- 2003283097 subject "TK7874 .W635 2002".
- 2003283097 tableOfContents "v. 1. Process technology".
- 2003283097 title "Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.".
- 2003283097 type "text".