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- 2003417445 contributor B9676518.
- 2003417445 contributor B9676519.
- 2003417445 created "2002.".
- 2003417445 date "2002".
- 2003417445 date "2002.".
- 2003417445 dateCopyrighted "2002.".
- 2003417445 description "Includes bibliographical references and index.".
- 2003417445 extent "viii, 316 p. :".
- 2003417445 identifier "4320086139".
- 2003417445 issued "2002".
- 2003417445 issued "2002.".
- 2003417445 language "jpn".
- 2003417445 publisher "Tōkyō : Kyōritsu Shuppan Kabushiki Kaisha,".
- 2003417445 subject "TK7872.T55 W37 2002".
- 2003417445 subject "Thin film devices Design and construction.".
- 2003417445 title "880-02 Hakumakuka gijutsu / Wasa Kiyotaka, Hayakawa Shigeru cho.".
- 2003417445 type "text".