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- 2003458906 contributor B9722920.
- 2003458906 created "2002.".
- 2003458906 date "2002".
- 2003458906 date "2002.".
- 2003458906 dateCopyrighted "2002.".
- 2003458906 description "Includes bibliographical references (p. 100-103).".
- 2003458906 description "Thesis (doctoral)--Universität München, 2002.".
- 2003458906 extent "104 p. :".
- 2003458906 issued "2002".
- 2003458906 issued "2002.".
- 2003458906 language "ger".
- 2003458906 publisher "München : Universität der Bundeswehr,".
- 2003458906 subject "MLCS 2006/01447 (T)".
- 2003458906 subject "Silicon crystals; excimer lasers".
- 2003458906 title "Excimer Laser unterstützte Prozesse für die Siliziumtechnologie / Yan Wang.".
- 2003458906 type "text".