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- 2003544603 alternative "Mask technology for integrated circuits and microcomponents".
- 2003544603 contributor B9777894.
- 2003544603 contributor B9777895.
- 2003544603 contributor B9777896.
- 2003544603 created "c2002.".
- 2003544603 date "2002".
- 2003544603 date "c2002.".
- 2003544603 dateCopyrighted "c2002.".
- 2003544603 description "Includes bibliographical references and index.".
- 2003544603 extent "xiii, 256 p. :".
- 2003544603 identifier "0819445312".
- 2003544603 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4764.".
- 2003544603 isPartOf "SPIE proceedings series ; v. 4764".
- 2003544603 issued "2002".
- 2003544603 issued "c2002.".
- 2003544603 language "eng".
- 2003544603 publisher "Bellingham, Wash. : SPIE,".
- 2003544603 subject "621.3815 22".
- 2003544603 subject "Integrated circuits Masks Congresses.".
- 2003544603 subject "Microlithography Congresses.".
- 2003544603 subject "TK7872.M3 E97 2002".
- 2003544603 title "18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ... [et al. ; published by SPIE--The International Society for Optical Engineering].".
- 2003544603 title "Mask technology for integrated circuits and microcomponents".
- 2003544603 type "text".