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- 2003544711 alternative "Micromachining technology for micro-optics.".
- 2003544711 contributor B9778063.
- 2003544711 contributor B9778064.
- 2003544711 created "c2003.".
- 2003544711 date "2003".
- 2003544711 date "c2003.".
- 2003544711 dateCopyrighted "c2003.".
- 2003544711 description "Includes bibliographical references and index.".
- 2003544711 extent "xlii, 262 p. :".
- 2003544711 identifier "0819447846".
- 2003544711 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4984.".
- 2003544711 isPartOf "SPIE proceedings series, 0277-786X ; v. 4984".
- 2003544711 issued "2003".
- 2003544711 issued "c2003.".
- 2003544711 language "eng".
- 2003544711 publisher "Bellingham, Wash., USA : SPIE,".
- 2003544711 subject "621.36/93 22".
- 2003544711 subject "Integrated optics Congresses.".
- 2003544711 subject "Microelectromechanical systems Congresses.".
- 2003544711 subject "Micromachining Congresses.".
- 2003544711 subject "Miniature electronic equipment Design and construction Congresses.".
- 2003544711 subject "Nanotechnology Congresses.".
- 2003544711 subject "Optoelectronic devices Design and construction Congresses.".
- 2003544711 subject "TA1660 .M5371 2003".
- 2003544711 title "Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA / Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).".
- 2003544711 type "text".