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- 2004025977 contributor B9836217.
- 2004025977 created "c2005.".
- 2004025977 date "2005".
- 2004025977 date "c2005.".
- 2004025977 dateCopyrighted "c2005.".
- 2004025977 description "Includes bibliographical references and index.".
- 2004025977 extent "xii, 423 p. :".
- 2004025977 identifier "0819456608".
- 2004025977 identifier 2004025977.html.
- 2004025977 issued "2005".
- 2004025977 issued "c2005.".
- 2004025977 language "eng".
- 2004025977 publisher "Bellingham, WA : SPIE Press,".
- 2004025977 subject "621.3815/31 22".
- 2004025977 subject "Integrated circuits Design and construction.".
- 2004025977 subject "Microlithography.".
- 2004025977 subject "TK7874 .L397 2005".
- 2004025977 title "Principles of lithography / Harry J. Levinson.".
- 2004025977 type "text".