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- 2004040690 contributor B9843194.
- 2004040690 created "c2004.".
- 2004040690 date "2004".
- 2004040690 date "c2004.".
- 2004040690 dateCopyrighted "c2004.".
- 2004040690 description "Includes bibliographical references and index.".
- 2004040690 extent "xvii, 490 p. :".
- 2004040690 identifier "3540204814 (acid-free paper)".
- 2004040690 identifier 2004040690-b.html.
- 2004040690 identifier 2004040690-d.html.
- 2004040690 identifier 2004040690-t.html.
- 2004040690 isPartOf "Springer series in materials science ; v. 72.".
- 2004040690 isPartOf "Springer series in materials science, 0933-033X ; 72".
- 2004040690 issued "2004".
- 2004040690 issued "c2004.".
- 2004040690 language "eng".
- 2004040690 publisher "Berlin ; New York : Springer-Verlag,".
- 2004040690 subject "621.3815/2 22".
- 2004040690 subject "Microelectronics Technological innovations.".
- 2004040690 subject "Semiconductors Simulation methods.".
- 2004040690 subject "TK7871.85 P678 2004".
- 2004040690 title "Predictive simulation of semiconductor processing : status and challenges / J. Dabrowski, E.R. Weber (eds.).".
- 2004040690 type "text".