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- 2004041639 alternative "Resolution enhancement techniques in optical lithography".
- 2004041639 contributor B9844314.
- 2004041639 created "c2004.".
- 2004041639 date "2004".
- 2004041639 date "c2004.".
- 2004041639 dateCopyrighted "c2004.".
- 2004041639 description "Includes bibliographical references and index.".
- 2004041639 extent "xx, 875 p. :".
- 2004041639 identifier "0819451665".
- 2004041639 isPartOf "SPIE milestone series ; v. MS 178".
- 2004041639 issued "2004".
- 2004041639 issued "c2004.".
- 2004041639 language "eng".
- 2004041639 publisher "Bellingham, Wash. : SPIE Press,".
- 2004041639 subject "621.3815/31 22".
- 2004041639 subject "Integrated circuits Design and construction.".
- 2004041639 subject "Microlithography.".
- 2004041639 subject "Photolithography.".
- 2004041639 subject "Semiconductors Etching.".
- 2004041639 subject "TK7874 .S4147 2004".
- 2004041639 title "Resolution enhancement techniques in optical lithography".
- 2004041639 title "Selected papers on resolution enhancement techniques in optical lithography / editor, F.M. Schellenberg.".
- 2004041639 type "text".