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- 2004046158 contributor B9849536.
- 2004046158 created "c2004.".
- 2004046158 date "2004".
- 2004046158 date "c2004.".
- 2004046158 dateCopyrighted "c2004.".
- 2004046158 description "Includes bibliographical references and index.".
- 2004046158 extent "x, 269 p. :".
- 2004046158 identifier "1580535364".
- 2004046158 identifier 2004046158.html.
- 2004046158 isPartOf "Artech House microelectromechanical system series".
- 2004046158 isPartOf "Microelectromechanical systems series.".
- 2004046158 issued "2004".
- 2004046158 issued "c2004.".
- 2004046158 language "eng".
- 2004046158 publisher "Boston : Artech House,".
- 2004046158 subject "681/.2 22".
- 2004046158 subject "Detectors.".
- 2004046158 subject "Microelectromechanical systems.".
- 2004046158 subject "TK7875 .M4537 2004".
- 2004046158 title "MEMS mechanical sensors / Stephen Beeby ... [et al.].".
- 2004046158 type "text".