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- 2004050669 contributor B9854651.
- 2004050669 contributor B9854652.
- 2004050669 created "2004.".
- 2004050669 date "2004".
- 2004050669 date "2004.".
- 2004050669 dateCopyrighted "2004.".
- 2004050669 description "Includes bibliographical references and index.".
- 2004050669 extent "xx, 283 p. :".
- 2004050669 identifier "1580535909 (alk. paper)".
- 2004050669 isPartOf "Microelectromechanical systems series".
- 2004050669 issued "2004".
- 2004050669 issued "2004.".
- 2004050669 language "eng".
- 2004050669 publisher "Boston : Artech House,".
- 2004050669 subject "621.381 22".
- 2004050669 subject "Microelectromechanical systems.".
- 2004050669 subject "TK7875 .M35 2004".
- 2004050669 title "Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.".
- 2004050669 type "text".